A semiconductor dynamic quantity sensor includes a semiconductor substrate that includes a movableelectrode, a pair of first fixed electrodes, and a pair of second fixed electrodes.
半导体动态量传感器包括一个半导体基底,上面有可移动电极,一对第一固定电极,一对第二固定电极。
2
The movable driving electrode film is thinner than the movable contact electrode film.