These measurements have correlated well with those made in conventional constant materialremovalrate grinding tests.
这些测量结果与用传统的恒磨除率磨削试验具有良好的相关性。
2
The existence of the soft layer could increase the material volume removed by one particle and increase the materialremovalrate during CMP.
软质层的存在一方面增大单个磨料所去除材料的体积,增加材料去除速率;
3
Adding the right amount of the additives and increasing the particle size can improve the effect of the mechanical reaction to achieve higher materialremovalrate.