The selectivity, the chemical and mechanical function's matching, the storage of the slurry and post CMP cleaning ULSI inlaid tungsten CMP have been studied in this article.

By means of lots of lightning impulse tests, power frequency arc tests as well as bend loading tests, a kind of clamping post composite insulators with matching insulation hoods is developed.

According to the field matching theorem, the transmission equation and scatter matrix expressions of the coaxial extractor system with support post are educed in this paper.