The gases absorbed on the surface of SiC particles are analyzed with the quadripole massanalyzer.
用四极质量分析仪对碳化硅颗粒表面吸收的气体进行了分析,获得了碳化硅颗粒的表面化学成分。
2
An implanter without ion massanalyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机,以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
3
The high resolution energy achromatic system consists of an electrostatic analyzer and a magnetic analyzer, which mass resolution can reach 600 and transmission is better than 80%.