Helium ion microscopy (HIM) offers the highest spatial resolution surface imaging of any scanningbeammethod, as well as extremely high surface sensitivity.
氦离子显微镜能够提供所有扫描射线法中最高空间分辨率的表面图像，以及极高的表面灵敏度。
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This paper described a new method for fast detecting the straightness of long guideways using a scanning laser beam.
本文介绍一种长导轨直线度激光扫描快速测量的新方法。
3
A method of determining the highness of an ideal object by beamscanning in the vertical plane and amplitude comparison.