The diaphragm was made with maskplate technology of MEMS.
光线引入器采用了MEMS工艺的掩模板制备工艺。
2
The original expression for phase maskplate can be extended according to the design principle of traditional phase maskplate.
根据传统相位掩膜板的设计原理，从两个方面对原有的相位掩膜板表达式进行扩展。
3
The method comprises the following steps: recording a required pattern onto a photographic plate through laser holography and manufacturing an optical maskplate with the holographic pattern;