A method of photo-masklithography for fabrication of micro Fresnel lenses Arraywas presented in this paper.
本文介绍用制版的方法制作的微菲涅耳透镜列阵及其成像实验。
2
This article mainly explains the process of LIGA technology, which includes X-ray masklithography, Micro-electroforming and Micro-copy.
本文主要阐述了LIGA技术的工艺过程,包括X射线深层光刻、微电铸和微复制工艺。
3
He believes this would be easier to carry out than the lithography currently used to manufacture SQUIDs because it would require no photosensitive mask and no chemicals to wash away that mask.