An electron beam does not diffract at atomic scales, so it does not cause blurring of the edges of features.
由于电子束在原子尺度不会绕射，所以它不会使得图案细节的边缘模糊。
2
The measurement is carried out by means of thermogravimetry scales (10) including at on one end of a beam (20) a catalyst body (30) of a coking reaction of the tars at the gaseous state.