The apparatus has a substrate table configure to hold a substrate, a projection system configured to project the patterned beamonto a target portion of the substrate.
所述设备具有用于保持衬底的衬底台,所述投影系统用于把已形成图案的射束投影到衬底的目标部分上。
2
This paper presents the features of a lens designed for converging the laser beamonto the target and the solution of the aspherical lenses using equal optical path principle.
本文介绍了激光打靶透镜的特点及用等光程原理求解非球面透镜的方法。
3
They reflect a concentrated beam of light onto the town's central square, creating an area of sunlight roughly 600 square meters.