In the manufacture process of integrated circuit (IC), lithography occupy a very important step, and the quality of photomask used in lithography affects the yield of LSI.
At the same time, to effectively lower power consumption, it should be noted not only considering LSI as a whole but also improving the design of system structure, its logic and circuit.
同时指出,必须既从LSI整体出发,也从体系结构、逻辑、电路各方面做起才能有效降低系统功耗。
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At last, typical circuits and circuit techniques applied to telecommunication LSI/VLSI are provided.