...Low Pin Count 少管脚数量 Low Pressure Chemical Vapor Deposition 低压化学汽相淀积 A chemical vapor deposition process that takes place at moderate temperatures. 一种化学汽相淀积过程，发生在适度的温度下。
Diamond thin films were successfully deposited on single - crystal si substrate at lowpressure by a homemade equipment of electron cyclotron resonance chemicalvapordeposition (ECRCVD).