An implanter without ion mass analyzer was used to fabricate thin SOI materials by lowenergy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机,以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
2
Effect of wheat's POD treated with vacuum in the process of lowenergyion beam implantation was researched.
研究了低能离子束注入过程中真空对小麦过氧化物酶同工酶的影响。
3
However, the discovery of bioeffects induced by ion beam implantation has opened a new branch in the field of ion beam applications in the life science-low-energy Heavy ion Biology.