Combining magnetron sputtering technology designs and makes membrane porous silicon sensor, it has good resistance and capacitance response when adsorbs alcohol.
结合磁控溅射技术设计制作了薄膜型多孔硅乙醇气敏元件,吸附乙醇时具有良好的电阻和电容响应。
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The geometrical thickness, which was obtained from the capacitance of membrane, can be used to characterize the existence of membrane.