The distribution of the extraction apertures is made to compensate the Gaussan of the ion beamcurrentdensity.
使引出孔的分布补偿束电流密度的高斯分布。使参数匹配并实行程序控制。
2
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beamcurrentdensity becomes uniform.
本发明提供一种排列有多个离子束引出孔的离子管，使得离子束电流密度变得均匀。
3
The invention provides an ion pipe and ion beam extraction method, wherein the ion pipe is arranged with a plurality of ion beam extraction holes, so that the ion beamcurrentdensity becomes uniform.