In this study, the microwaveplasmadevice is designed to excite and maintain stable plasma on atmospheric press.
本研究设计了一套微波等离子体反应器,在大气压下激发并维持稳定的等离子体。
2
In recent years, experiments show that in the plasma loaded high power microwavedevice may obtain much higher interaction efficiency and output power than the ones absence of plasma.
近年来实验研究发现,等离子体加载高功率微波器件后,器件的输出功率和互作用效率得到显著的提高。
3
A microwaveplasma processing device and a gas supply member capable of forming a uniform thin film on a substrate to be processed.