The microwaveelectroncyclotron resonance (ECR) plasma is one of the most important means for depositing thin films and microfabrications as well as surface modifications of materials.
微波电子回旋共振等离子体是淀积薄膜、微细加工和材料表面改性的一种重要手段。
2
A stable plasma in the mirror is produced by using microwave with magnetron at electroncyclotron frequency.
利用工作于电子回旋频率的磁控管发射的微波功率在磁镜中产生了稳定的等离子体。
3
Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electroncyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.