With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
2
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
3
AOLang laser technology co., LTD is mainly engaged in laser processing equipment, laser micro processing systems development, production and sales.