With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the microsystem technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
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The economics system is the reflection of material objects. Materialist dialectics analyses its macro system and microsystem. Materialist dialectics is not a kind of doctrine, but a kind of method.