The system of MOCVD was designed, assembled and debugged. Mo substrate was heated in a cold-wall MOCVDreactor in order to heat it more centrally;
设计、组装、调试了MOCVD系统，采用冷壁加热方式，对基体实现选择性加热；
2
Because of the complicated transport process and invisible characteristics, domestic researchers have carried out few explorations on internal flow and temperature distribution of the MOCVDreactor.