Some physical problems, related to the particle on the surface, i. e. optical resonance and near-fieldeffects in dry laser cleaning are also analyzed.
最后介绍了在激光干式清洗中与基底表面粒子相关的一些物理问题：光学谐振和近场效应。
2
In order to get a better understanding of the effects of the near-field impedance, some cases of the variation of the near-field foundation models have been examined.