This paper presents a testing technology for optical fiber connector end surface based on microscopicinterferometry.
本文研究了一种基于显微干涉的三维物体静测试系统，对光纤连接器端面进行了测量。
2
MEMS dynamic testing system based on stroboscopic microscopicinterferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
3
A stroboscopic microscopicinterferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.