Fuzzy control and adaptive inverse control using in the micro-positioning system are introduced.
介绍了模糊控制和自适应逆控制在微位移系统控制中的应用。
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A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
In this paper, a new micro-positioning servo control system using a piezoelectric. Actuator is introduced, the hardware consist and working principle are also given.