Needless to say, the 22-/20-nm logicnode will be challenging.
毫无疑问,将逻辑芯片的制程推进到22/20nm节点是一个挑战。
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The tool is reportedly being used for the development of Intel Corp.’s 22-nm logicnode. With a different tool, Nikon was the sole lithography vendor for the critical layers at Intel’s 32-nm node.