The basic working principle, structural composition of the device was introduced with focuses on structural design and processing technique of the micro-mechanicalaccelerometer.
介绍该装置的结构组成、基本工作原理，特别重点介绍了微机械加速度传感器的结构设计、加工工艺流程。
2
Potting is a key step for the packaging of high-g micro-electro-mechanical system(MEMS) accelerometer.
灌封是高量程微机械加速度计实用化的一个关键步骤。
3
The noise of capacitive microaccelerometer include mechanical thermal noise and electrical thermal noise;