The method and the principle of manufacturing micro-machines by sacrificing layer technology together with 3-d lithography is discussed also.
同时还介绍了立体光刻技术结合抗腐蚀层、牺牲层工艺加工微器件的原理、方法和应用。
2
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
Advances in computers and biophysics have started a micro miniature revolution that allows scientists to envision and in some cases actually build microscopic machines.