Micromachined gyroscope with electromagnetically levitated rotor (MGELR) is a new kind of an-gular rate sensor, which has the same working mechanism as traditional mechanical gyroscope.
电磁悬浮转子微陀螺（MGELR）是一种新型的角速率传感器，它和传统机械陀螺具有相同的工作机理。
2
Microcatilever is a kind of simple sensor configuration that is easily micromachined and mass produced.
微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。
3
A new micromachined CMOS thermal conductivity pressure sensor has been developed.