Handbook of Micro lithography, Micromachining, and Micro fabrication. Vol.1: microlithography.
微平版印术，显微机械加工，和微制作手册：卷一：微平版印术。
2
Moore's Law has difficulties in key technologies such as production cost and semiconductor microlithography, as well as in basic physical ideas.
分析了摩尔定律在制造成本、光刻等关键技术，以及物理基础思想等方面的困难和制约。
3
A new algorithm which is used to transform center-hollowed polygons of CIF format in microlithography pattern into rectangles of PG3600 format is presented.