Three micro scale measurement methods have been developed, which are array microindentation mark method, speckle microinterferometry and crystal grain deformation analysis (CGDA).
首先在检测方法和技术方面主要做了如下三个方面的工作：一、微区域变形的微纳米压痕标记检测方法。
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A video microscope was introduced as a tool for microimaging and electronical recording in microinterferometry. It makes the experimental setup simple and the optical adjustment easy.