Abstract: Lithographic exposure is the key process in the manufacture of integratedcircuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
Lithographic exposure is the key process in the manufacture of integratedcircuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。
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It has key courses of microelectronics: solid-state electronic theory, microelectronic devices and principles, integratedcircuit design, micro-electronics processing, etc.