The invention relates to a charge-super sensitive Coulomb meter and its preparation method that belongs to microelectronicdevice and micro-processing method.
本发明属于微电子器件和微加工方法，特别是涉及一种对电荷超敏感的库仑计及其制备方法。
2
In chemical enterprise, integrated circuit and microelectronicdevice are adopted for most of the instruments. However, the integrated circuit is subject to lightning and static electricity.
化工企业仪表发展趋势大多是采用集成电路，微处理设备，但集成电路抗雷击、静电能力十分脆弱。
3
The invention belongs to the technical field of a microelectronicdevice, and more particularly discloses an asymmetrical source-drain field effect transistor and a preparation method thereof.