Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for MicroElectroMechanicalSystem(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
2
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanicalsystem (MEMS) products.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
3
MicroElectroMechanicalSystem (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.