Besides, thin-film silicon technologies have also been developed to place a thin film of amorphous or microcrystalline silicon onto flat large-area substrates such as glass.
另外，薄膜硅技术也被开发出来，将非晶硅或者微晶硅薄膜放到玻璃那样的平的大面积衬底上。
2
The results indicate that the amorphous film gradually transfers into microcrystalline Si, and the grain size is nanometer order of magnitude.
结果表明：薄膜由非晶硅结构转变为微晶硅结构，微晶硅晶粒尺寸在纳米级。
3
The electrical and structural properties of microcrystalline silicon thin film and solar cells fabricated by VHF-PECVD were studied.