On basis of comparison with other types of detectors, we designed microchannel plate detector which is the most advanced detector for EBM up to now.
在与各种探测器比较的基础上，我们设计了微通道板探测器，它是目前用于电子束曝光机的最先进的探测器。
2
The fundamental principle of a two-dimensional position-sensitive detector based on microchannel plate is presented. The resistive anode plate and data read-out system of the detector were designed.