Microbridge mass airflow sensors of AWM series, a new kind of airflow sensors, applied in micro airflow measurements is presented.
介绍一种新型气体流量传感器——AWM系列微桥式气流质量传感器在微小气体流量测量中的应用。
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The prepared monocrystalline substrate plane has an Angle to crystalline 001 plane and superconductive film microbridge is etched in the inclined direction to 001 plane.