High-power piezoelectric ceramics are desirable to combine a high mechanicalqualityfactor(Qm) with a high piezoelectric constant(d 33) and a high planar coupling factor(Kp).
The device parameter as well as resonance frequency, mechanicalqualityfactor and work band width were determined by the equivalent circuit input impedance admittance circle diagram.
Vibration of lapping machine is an important influencing factor on the lapping quality of diamond cutting tools in mechanical lapping, especially in the precision lapping process.