A kind of electromagnetic actuation opticalswitch is designed based on the high performance of polyimide (PI) in mechanical character, insulation and heat-resistant.
利用聚酰亚胺(PI)优良的机械、绝缘、耐热等性能,设计出基于PI膜的磁控光开关。
2
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) opticalswitch with a slant lower electrode.