Ion scattering spectroscopy can be carried out with HIM, allowing this most surface sensitive technique to be applied to analysis tasks where spatial resolution is also required.
An experiment was conducted to study the high-temperature annealing characteristics of polysilicon films using atomic force microscope, secondary ion mass spectroscopy and probe.
利用原子力显微镜、二次离子质谱分析仪和探针，对多晶硅薄膜的高温退火特性进行了实验研究。
3
For predicting the state of charge (SOC) of lithium-ion rechargeable battery accurately, a method based on electrochemical impedance spectroscopy was presented.