Based on the rf (radio frequency) sheath model, the equation for ion momentum when reaching the material surface was derived.
利用射频鞘层模型，推出了离子到达被加工材料表面时的动量的表达式。
2
Based on the radio frequency sheath model, the equations for ion velocity, density, and energy flux colliding on the material surface are derived.
在射频鞘层模型基础上，推出了离子轰击材料表面的速度、浓度及能量通量的表达式。
3
Some numerical results have been obtained for the instantaneous sheath thickness, the instantaneous voltage and the ion flux density on the substrate, etc.