DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ionmilling and thin film deposition.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
2
Some small grain free regions (GFR) near the hole in the transmission electron microscopic specimen of this material prepared by ionmilling was observed.
在离子减薄制备的电镜样品中，孔的边缘往往有一些无颗粒区。
3
This paper concisely describes the good results gained in making foils of cemented carbides for TEM by ionmilling technique in the study of micro-structure.