The invention relates to a wafer clamp for an ionimplanter which belongs to the field of semiconductor equipment manufacture.
本发明涉及一种离子注入机用的晶片夹,属于半导体装备制造领域。
2
Introduced the configuration of typical ionimplanter, analyzed the importance of the implantation mechanical scanning technology.
简单介绍了典型离子注入机的组成,分析了离子注入机中扫描技术的重要性。
3
Vertical scanner is the supporting part of a series process ionimplanter, which transfer high speed movement from outside of the chamber to the target inside.