The effect factors such as the buried channel junctiondepth and substrate doping concentration on the CCD's optimum operating point and maximum charge capacity are analysed.
分析计算了埋沟结深、衬底掺杂等对CCD最佳工作点及最大电荷处理量的影响。
3
Theoretic analysis results show that the doping concentration and junctiondepth are main factors for the range of spectrum response of Si color sensor with double PN junction.