Helium ion microscopy (HIM) offers the highest spatial resolution surface imaging of any scanningbeam method, as well as extremely high surface sensitivity.
氦离子显微镜能够提供所有扫描射线法中最高空间分辨率的表面图像，以及极高的表面灵敏度。
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Nodular defects, which are in critical state of damage, are cross-sectioned by focusing on the ionbeam and by imaging using a field emission scanning electron microscope.