High quality ITO films are prepared onto K9 glass substrates by oxygen ion-assisted electron beam reactive evaporation.
采用氧离子辅助电子束反应蒸发工艺在K9玻璃基底上制备了性能优异的ITO薄膜。
2
The system include pulse cathodic arc ion deposition, direct current cathodic arc ion deposition, magnetic sputtering and electronic beamevaporation technologies.
By means of electron beamevaporation and ion source auxiliary technology, the paper shows the influence of the number of layers on the quality of film polarization beam splitter prism.