Abstract : Ionbeametching technologies for developing large aperture Diffractive Optical Elements (DOEs) were reviewed.
摘要 : 总结了大尺寸衍射光学元件离子束刻蚀技术的研究进展。
2
The 16-step Fresnel lens had been fabricated by thin film deposition and ionbeametching and it has been used in refractive-diffractive CCD camera.
使用薄膜沉积法和离子束刻蚀法制作16阶菲涅耳透镜,应用于折衍混合CCD相机。
3
Ionbeametching (IBE) was applied to treat the as-polished surfaces of a CLBO crystal with varying in rotation speed of clamp, etching times and incidence angles.