Objective: To study the effect of TiN film obtained by ionbeam assisted deposition (IBAD) technology on magnetic force of FeCrMo soft magnetic alloy.
目的:研究应用离子束辅助沉积制备氮化钛薄膜后,对磁性附着体磁力的影响。
2
DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.
衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。
3
DLC films and gradient composition DLC films were deposited on si substrates in plasma-ionbeam enhanced deposition system for the industrial applications and improving the adhesion.