The results show that the damaged layer of silicon cut by WEDM mainly appears massive impurity elements, remelted and elastic distortion with a high density dislocation.
结果表明：电火花线切割单晶硅损伤层主要由杂质元素重污染层、重熔层和含有高密度位错的弹性畸变层组成；
2
The possibility of the stimulated radiation at the low atomic density is demonstrated, and the possibility of impurity examination by means of stimulated radiation signals is estimated.
证实了在低原子浓度下探测受激辐射的可能性，并估计了用受激辐射信号检测杂质的可能性。
3
The radiated power of impurity ions varying with time and electron temperature for given the profiles of electron temperature and density is calculated, and the corresponding physics is discussed.