With the Dopplerlaser vibration measurement system, the vibration velocity curves of the flip chip and tool tip were obtained during thermo-sonic flip chip bonding.
采用多普勒激光振动测量系统，获得了热超声倒装键合过程中工具末端及芯片的振动速度曲线。
2
This paper presents a compact laser diode doppler interference system used in velocitymeasurement. The velocity measurement accuracy and application of the system are discussed.
本文就半导体激光小型多普勒干涉系统的研制及作为速度测量系统的测量精度和实用可行性进行了探讨。
3
LaserDopplervelocity is widely used in the measurement field of velocity for its high accuracy and easy-used property.