...工程研究所 Institute of Precision Engineering, Xian Jiaotong University MEMS与纳米技术之纳米技术V 激光诱导气相沉积(LICVD)法 LICVD原理: 以激光(如CO 2 激光、准分子激光、YAG (yttrium aluminum garnet) 、Ar+等)作为加热源或激励光源,利用反应气...
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?激光感生化学气相淀积(Laser Induced Chemical Vapor Deposition)
... In this study we designed and made the preparation equipment of nano-silicon powder by LICVD (laser induced chemical vapor deposition), and introduced the designing thought of key parts.
In this study we designed and made the preparation equipment of nano-silicon powder by LICVD (laser induced chemical vapor deposition), and introduced the designing thought of key parts.
It is used in many areas. In this paper, the general principles of LICVD (laser induced chemical vapor deposition) were investigated and the measures to reduce dissociated si were put forward.