Based on the design process of linearvariabledifferentialtransformer (LVDT), the expert design system of LVDT is put forward.
在分析差动变压器式位移传感器整个设计流程的基础上,提出开发位移传感器专家设计系统。
2
The local heights of wafer surface are measured by the linearvariabledifferentialtransformer (LVDTs) when the different offsets between wafer and wafer chuck exist.
在晶圆与承片台存在不同偏移量时,利用线性差分传感器在线测量晶圆上不同点的局部高度;
3
Signal conditioning circuit AD698 for LinearVariableDifferentialTransformer (LVDT) is introduced, and the application of this circuit can greatly simplify the circuit design.