Meanwhile, we found that the latter one is more suitable for measuring machine tools linear positioning accuracy after inspecting a vertical milling machine by using the laser interferometer.
同时，通过对一台数控铣床的测量后，发现激光干涉仪测量法更适合于机床定位精度的快速评定。
2
The main research of the paper is the linear demodulated technique based on MZ interferometer.
本文主要研究基于MZ 干涉仪的光纤光栅线性解调技术。
3
This paper overviews the application of laser interferometer in the precision analysis of semiconductor process equipment. The laser straightening effecting on linear measuring is introduced.